YASKAWA XU-RCM6501 Semiconductor Robot for Wafer Handling
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YASKAWA XU-RCM6501
High-precision semiconductor robot designed for cleanroom wafer handling with ISO Class 1 certification
| Brand | YASKAWA |
| Model | XU-RCM6501 |
| Voltage | 200-240V AC |
| Country of Origin | Japan |
| Weight | 120 kg |
| Dimensions | 800x600x1200 mm |
| Warranty | 6 months |
| Certifications | CE, ISO 14644-1 Class 1 |
| SKU / MPN | XU-RCM6501 |
| What’s in the box | Robot arm, controller, teach pendant, power cable, instruction manual |
| Axes | 6 |
| Payload | 5 kg |
| Reach | 650 mm |
| Repeatability | ±0.02 mm |
| Cleanroom Class | ISO Class 1 |
| Controller | YRC1000 |
Key benefits: Ultra-low particle generation, high-speed operation, compact design, precise wafer handling, easy integration
Typical applications: Wafer transfer, semiconductor manufacturing, LCD panel handling, cleanroom automation, photovoltaic cell processing
Lifecycle: Mature product, limited availability for used units
1 review for YASKAWA XU-RCM6501 Semiconductor Robot for Wafer Handling
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David L. –
Trustworthy supplier for industrial components. Will purchase again.