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RF Power Supply MPS SPECTRUM 11002-07160 Industrial Use
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MPS SPECTRUM 11002-07160
Reliable refurbished RF power supply for precision plasma processes in semiconductor and industrial manufacturing
| Brand | MPS |
| Model | SPECTRUM 11002-07160 |
| Voltage | 208/400V AC, 3-Phase |
| Country of Origin | United States |
| Weight | 42 kg |
| Dimensions | 483 x 533 x 178 mm (19" Rack Mount) |
| Warranty | 6 months |
| Certifications | CE, UL, RoHS, SEMI |
| SKU / MPN | SPECTRUM 11002-07160 |
| What’s in the box | RF Power Supply Unit, Power Cable, User Manual, Connector Kit |
| Output Frequency | 13.56 MHz (ISM Band) |
| Output Power | 1600 W (1.6 kW) |
| Output Voltage | 0-2000 V DC |
| Input Voltage | 208/400 VAC, 3-Phase |
| Cooling Type | Forced Air Cooling |
| Communication Interface | Analog/Digital I/O, RS-232/485 |
Key benefits: Stable 13.56 MHz frequency output, 1600W high power capacity, compact 3U rack design, broad process compatibility, cost-effective used condition with tested performance
Typical applications: Semiconductor plasma etching, thin-film deposition, PECVD processes, sputtering systems, photovoltaic manufacturing, R&D plasma research
Lifecycle: Mature product line, service and replacement parts available through MPS support channels
1 review for RF Power Supply MPS SPECTRUM 11002-07160 Industrial Use
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Exact match for many brands
We make replacements easy with an exact match for almost any brand.
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Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.
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Thomas K. –
Profibus modules arrived with proper firmware version. Plug and play.