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Process Gas Filter Entegris WGMXMBRR4 – High Purity
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Entegris WGMXMBRR4
High-purity filtration solution for critical semiconductor process gas applications with sub-nanometer contaminant removal
| Brand | Entegris |
| Model | WGMXMBRR4 |
| Voltage | Not specified |
| Country of Origin | USA |
| Weight | 0.45 kg |
| Dimensions | 4.5 x 2.5 x 2.5 in |
| Warranty | 12 months |
| Certifications | ISO 9001, SEMI |
| SKU / MPN | WGMXMBRR4 |
| What’s in the box | Filter unit, documentation, installation guide |
| Filter Type | Membrane Gas Filter |
| Membrane Material | PTFE |
| Micron Rating | 0.003 micron |
| Inlet/Outlet Connection | 1/4 inch VCR |
| Max Operating Pressure | 80 psig |
| Max Operating Temperature | 150°F (65°C) |
Key benefits: Ultra-high purity filtration, low particle shedding, compact design, long service life, consistent flow performance, easy integration
Typical applications: Bulk gas delivery systems, semiconductor wafer processing, photolithography gas lines, specialty gas filtration, process tool gas panels
Lifecycle: Active product, available with 5+ year support
1 review for Process Gas Filter Entegris WGMXMBRR4 – High Purity
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Kevin H. –
The VFD works perfectly with our motor setup. Great communication from seller.