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Mass Flow Controller Brooks 5866M 5850EM High Accuracy
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Brooks 5866M 5850EM
Precision thermal mass flow controller delivering ultra-accurate, repeatable gas flow regulation for demanding industrial and laboratory process environments.
| Brand | Brooks |
| Model | 5866M 5850EM |
| Voltage | 24V DC / ±15V DC |
| Country of Origin | USA |
| Weight | 1.5 kg |
| Dimensions | 140 x 95 x 60 mm |
| Warranty | 24 months |
| Certifications | CE, UL, ATEX, IECEx, RoHS |
| SKU / MPN | 5866M-5850EM |
| What’s in the box | Mass Flow Controller, power/communication cable, calibration certificate, quick start guide, mounting hardware |
| Flow Range | 0-10 sccm to 0-1000 slm (model dependent) |
| Accuracy | ±1% of set point |
| Repeatability | ±0.2% of full scale |
| Response Time | Less than 1 second |
| Operating Temperature | 0°C to 65°C |
| Communication Protocol | Analog 0-5/0-10 VDC, 4-20 mA, RS-485, DeviceNet |
Key benefits: Multi-gas/multi-range flexibility, ±1% accuracy, fast sub-second response, digital and analog communication options, robust industrial-grade construction, low pressure drop design
Typical applications: Semiconductor process gas control, biopharmaceutical fermentation, analytical instrumentation, chemical processing, thin film deposition, fuel cell testing, research laboratories
Lifecycle: Active production model with 15+ years of manufacturer support and spare parts availability
1 review for Mass Flow Controller Brooks 5866M 5850EM High Accuracy
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William G. –
Excellent support when we had integration questions. The product met our standards.