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Mainboard Control Board ASML 4022 471 87385 Replacement
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ASML 4022 471 87385
Genuine ASML mainboard for reliable performance in semiconductor lithography equipment
| Brand | ASML |
| Model | 4022 471 87385 |
| Voltage | 3.3V/5V/12V DC |
| Country of Origin | Netherlands |
| Weight | 0.85 kg |
| Dimensions | 280 x 200 x 25 mm |
| Certifications | CE, RoHS, ISO 9001 |
| SKU / MPN | 4022 471 87385 |
| What’s in the box | ASML mainboard, mounting hardware, documentation |
| Form Factor | Custom industrial board |
| Processor Support | High-performance industrial CPU |
| Memory Type | DDR4 ECC |
| Interfaces | PCIe, Ethernet, USB, Serial |
| Operating Temperature | 0°C to 50°C |
| Compatibility | ASML lithography systems |
Key benefits: OEM-certified quality, high reliability, precision-engineered for ASML systems, long lifecycle support, plug-and-play replacement
Typical applications: Semiconductor lithography machines, wafer inspection systems, photolithography equipment, EUV/DUV tools, advanced node manufacturing
Lifecycle: Active product, supported for 7+ years
1 review for Mainboard Control Board ASML 4022 471 87385 Replacement
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Exact match for many brands
We make replacements easy with an exact match for almost any brand.
We use OEM catalogs to match your part number
Don’t worry about ordering the wrong part by matching your part number with our OEM catalogs.
Competitively priced
Shop with confidence knowing we are offering very competitve pricing!
Orders usually ship the same day
Rest assured your order will arrive as soon as possible knowing we usually ship the same day.
Individually inspected
Before any package is shipped we carefully inspect every product to ensure quality.
Guaranteed for one full year
All of our New Surplus and Reconditioned products come with a 1 year warranty.

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Building a reputation for quality products at a reasonable price. Our inventory is far more extensive than what can be represented on our web site, so please call one of our knowledgeable salesmen with your specific needs.

Robert M. –
The stepper motor is smooth and quiet. Will use this supplier again.