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EBARA ESA70W-D Dry Vacuum Pump for Industrial Use
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EBARA ESA70W-D
Reliable oil-free dry vacuum pump for semiconductor and industrial processes, ensuring clean operation and low maintenance
| Brand | EBARA |
| Model | ESA70W-D |
| Voltage | 200-240V AC, 50/60Hz |
| Country of Origin | Japan |
| Weight | 120 kg |
| Dimensions | 800x450x500 mm |
| Warranty | 6 months |
| Certifications | CE, UL |
| SKU / MPN | ESA70W-D |
| What’s in the box | Dry vacuum pump unit, inlet/outlet flanges, operation manual, installation kit |
| Pumping Speed | 70 m³/h |
| Ultimate Pressure | 0.5 Pa (5×10⁻³ mbar) |
| Motor Power | 2.2 kW |
| Inlet Connection | NW40 flange |
| Outlet Connection | NW25 flange |
| Cooling Method | Air-cooled |
Key benefits: Oil-free operation, low running costs, compact footprint, high durability, easy maintenance, environmentally friendly
Typical applications: Semiconductor manufacturing, thin film deposition, vacuum coating, chemical vapor deposition, load-lock chambers, industrial vacuum processes
Lifecycle: Active product, spare parts available for 10+ years
1 review for EBARA ESA70W-D Dry Vacuum Pump for Industrial Use
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Kevin H. –
The servo amplifier performed well in velocity mode. Documentation was helpful.