AMAT 0010-63792 WG3D401R2 Load Lock Module for Wafer Fab
Condition:
NEW
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Estimated between Thursday, November 5 and Saturday, November 7
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AMAT 0010-63792 WG3D401R2
High-throughput vacuum load lock module for Applied Materials wafer processing platforms, enabling rapid substrate transfer without breaking process vacuum.
| Brand | AMAT |
| Model | 0010-63792 WG3D401R2 |
| Voltage | 208-240V AC |
| Country of Origin | United States |
| Weight | 45 kg |
| Dimensions | 600 x 500 x 400 mm |
| Warranty | 6 months |
| Certifications | CE, SEMI S2, UL |
| SKU / MPN | 0010-63792 WG3D401R2 |
| What’s in the box | Load Lock assembly, mounting hardware, interface cables, installation manual |
| Product Type | Load Lock Module |
| Compatible Platform | Applied Materials Endura / Centura |
| Wafer Size | 200 mm / 300 mm |
| Pump Port | ISO-K 100 |
| Vacuum Level | 10^-7 Torr (base) |
| Material | Anodized Aluminum |
Key benefits: Enables fast wafer transfer, maintains ultra-high vacuum integrity, OEM-compatible design, reduces particle contamination, robust construction for 24/7 fab operation
Typical applications: Semiconductor wafer fabrication, PVD/CVD process chambers, etch and deposition systems, R&D vacuum processing
Lifecycle: Active, OEM-supported with long-term availability
1 review for AMAT 0010-63792 WG3D401R2 Load Lock Module for Wafer Fab
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Linda B. –
The servo amplifier performed well in velocity mode. Documentation was helpful.