8 in stock
1.5kW RF Generator Advanced Energy Apex 1513 13.56 MHz
Condition:
USED
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Delivery
Estimated between Saturday, September 19 and Monday, September 21
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Advanced Energy Apex 1513
Reliable high-power 1.5kW RF generator for precision plasma processes in semiconductor and industrial applications
| Brand | Advanced Energy |
| Model | Apex 1513 |
| Voltage | 208V AC, single phase |
| Country of Origin | USA |
| Weight | 15.9 kg (35 lbs) |
| Dimensions | 88 x 483 x 508 mm (3.5 x 19 x 20 in) |
| Warranty | 90 days (used item) |
| Certifications | CE, UL, RoHS |
| SKU / MPN | Apex 1513 |
| What’s in the box | Apex 1513 RF Generator unit, power cable, user manual (CD) |
| Frequency | 13.56 MHz |
| Output Power | 1500 W (1.5 kW) |
| Frequency Accuracy | ±0.005% |
| RF Output Connector | Type N female |
| Cooling | Forced air |
| Interface | Analog, RS-232/RS-485, DeviceNet, EtherCAT optional |
Key benefits: High frequency stability, compact design, advanced arc handling, flexible communication interfaces, robust thermal management, proven semiconductor-grade reliability
Typical applications: Plasma etching, PECVD, PVD sputtering, plasma-enhanced deposition, semiconductor wafer processing, flat panel display manufacturing, solar cell production, R&D plasma research
Lifecycle: Mature product, supported by Advanced Energy service network, refurbished/used units offer cost-effective alternative
1 review for 1.5kW RF Generator Advanced Energy Apex 1513 13.56 MHz
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Mark O. –
The stepper motor is smooth and quiet. Will use this supplier again.