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0026-73995 REV 1 AMAT Plasma Source: Advanced Process Control
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AMAT Plasma Source 0026-73995 REV 1 High-Performance Device
High-performance plasma source for semiconductor and thin-film deposition processes, offering precise RF power control and compatibility with multiple process gases for reliable B2B manufacturing.
| Brand | AMAT |
| Model | 0026-73995 REV 1 |
| Voltage | 380-480V AC, 3-phase |
| Country of Origin | United States |
| Weight | 15.0 kg |
| Dimensions | 350 x 250 x 200 mm |
| Warranty | 90 days |
| Certifications | CE, SEMI S2, RoHS |
| SKU / MPN | 0026-73995 REV 1 |
| What’s in the box | Plasma source unit, mounting brackets, RF cable, installation guide |
| Power Output | 1000W (adjustable) |
| Frequency | 13.56 MHz |
| Gas Compatibility | Ar, O2, CF4, SF6 |
| Cooling Method | Water-cooled (5 L/min) |
| RF Connector | Type N, 50 ohms |
| Operating Temperature | 0-50°C |
Key benefits: Stable plasma ignition, low maintenance, wide gas compatibility, compact design for easy integration, robust water cooling
Typical applications: Semiconductor etching, PECVD, sputtering, surface cleaning in cleanroom environments
Order number: AMAT Plasma Source 0026-73995 REV 1 High-Performance Device
Lifecycle: Active
1 review for 0026-73995 REV 1 AMAT Plasma Source: Advanced Process Control
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Susan Y. –
Profibus modules arrived with proper firmware version. Plug and play.