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Insulator Ring Tokyo Electron 1810-328648-11 OEM Ceramic Part
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Tokyo Electron 1810-328648-11
OEM-grade ceramic insulator ring engineered for Tokyo Electron semiconductor processing equipment, ensuring reliable high-voltage isolation and extended chamber uptime.
| Brand | Tokyo Electron |
| Model | 1810-328648-11 |
| Voltage | Not specified |
| Country of Origin | Japan |
| Weight | 0.25 kg |
| Dimensions | 120 x 120 x 25 mm |
| Certifications | ISO 9001, RoHS |
| SKU / MPN | 1810-328648-11 |
| What’s in the box | 1x Insulator Ring, protective packaging, compliance documentation |
| Material | High-purity Alumina Ceramic (Al2O3) |
| Inner Diameter | 85 mm |
| Outer Diameter | 115 mm |
| Dielectric Strength | >15 kV/mm |
| Operating Temperature | -50°C to 800°C |
| Compatibility | TEL Coater/Developer and Plasma Etch Systems |
Key benefits: Precision-machined high-purity alumina construction, exceptional dielectric strength, thermal shock resistance, exact OEM fit for TEL systems, reduced particle generation, long service life
Typical applications: Semiconductor wafer processing chambers, CVD/PVD deposition systems, plasma etch equipment, coater/developer modules, electrostatic chuck assemblies
Lifecycle: Active OEM spare part, available for ongoing service and field replacement
1 review for Insulator Ring Tokyo Electron 1810-328648-11 OEM Ceramic Part
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Exact match for many brands
We make replacements easy with an exact match for almost any brand.
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Robert M. –
Good quality sensor, accurate readings. Will order more for our production line.