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Vacuum Pressure Sensor MKS 870B13TCB4GA1 – High Accuracy
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MKS 870B13TCB4GA1
High-precision vacuum measurement for demanding semiconductor and thin-film processes
| Brand | MKS |
| Model | 870B13TCB4GA1 |
| Voltage | 24V DC |
| Country of Origin | USA |
| Weight | 0.5 kg |
| Dimensions | 120x60x40 mm |
| Warranty | 24 months |
| Certifications | CE, RoHS |
| SKU / MPN | 870B13TCB4GA1 |
| What’s in the box | Vacuum pressure sensor unit, connector kit, calibration certificate, user manual |
| Pressure Range | 0-1000 Torr |
| Accuracy | ±0.25% of reading |
| Output Signal | 0-10 VDC |
| Operating Temperature | 0-50°C |
| Response Time | <10 ms |
| Process Connection | 1/4 inch VCR |
Key benefits: Exceptional accuracy, fast response, robust construction, easy integration with MKS control systems
Typical applications: Semiconductor manufacturing, thin-film deposition, vacuum coating, plasma etching, leak detection
Lifecycle: Active product, 5+ years availability
1 review for Vacuum Pressure Sensor MKS 870B13TCB4GA1 – High Accuracy
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